Instrument model
PR-L05 I type
PR-L05 II type
PR-L05 III type
Measuring range
4mm
4mm
4mm
Measuring principle
White light interferometry
White light interferometry
White light interferometry
Vertical decomposition energy
<50nm
<10nm
<5nm
Horizontal decomposition energy
0.43μm
0.43μm
0.43μm
Measuring area
≥185 × 140μm
≥185 × 140μm
≥185 × 140μm
Measurement repeatability
≤5% @ 1σ
(Standard steps)
≤2% @ 1σ
(Standard steps)
≤1% @ 1σ
(Standard steps)
Vertical scanning speed
Standard is 60μm / s
Standard is 30μm / s
Standard is 10μm / s
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